Model：8 INCH OVEN CASSETTE

Dimension：218(L)X214(W)X207(H)mm

Specification：13  SLOT 

Applicable：8 INCH WAFER

Material：Aero-aluminium alloy（<400℃）

Surface treatment: hard oxidation

Slot pitch：12.7 mm

characteristic：AUTO LOCK+ OHT head +AGV+DSC

槽    距：12.7 mm

特    征：AUTO LOCK+ 蘑菇头 +AGV+DSC