Model：12 INCH OVEN CASSETTE

Dimension：312(L)X420(W)X339(H)mm

Specification：13  SLOT 

Applicable：12 INCH THIN WAFER

Material：Aero-aluminium alloy（<400℃）

Surface treatment: hard oxidation

Slot pitch：20 mm

characteristic：AUTO LOCK+ OHT head + DSC