Filtration System Design: Auxiliary Equipment for Secondary Purification of Pure Water in Wet and Yellow Light Machines - DIW Purification Station
In the advanced manufacturing processes of Photo/Wet equipment, there is an essential need for the secondary purification of Deionized Water (DIW). This purification process significantly reduces the defects caused by metal ions and particles.
As an example, a customized DIW local supply system is designed. It consists of two sets of 20 - inch filters connected in parallel, which can meet the DIW purification requirements of two High - Quality DIW Recirculation (HQDR) tanks in a single piece of equipment.
Pneumatic valves are installed at the inlet and outlet of the system. These valves are interlocked with leak sensors. The system also includes CDA solenoid valves, pressure regulating valves, and manual switch buttons for the solenoid valves.
The facility provides a 24V power supply and DIW connection for the equipment.
The DIW Purification Station is installed behind the machine, approximately 3 meters away from the equipment.
Liquid Filter Replacement and Related Equipment Retrofit
1. Filter/Filter Element Replacement and Related Testing Services for Utility and Equipment
- Offer services for filter element replacement and integral filter replacement.
- Conduct particle testing and sampling analysis after replacement.
- Upgrade filtration precision and eliminate metal ions.
- Increase the number of filters and install additional filter cabinets.
- Undertake the retrofit of relevant pipelines and equipment.
- Engage in the discussion and formulation of test plans.
- Provide relevant testing equipment.
The key service technicians possess 15 - year experience in filter application and product development within the semiconductor industry.
