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Technical services for LDS design and production, and cylinder replacement

LDS-related Services and Cylinder Replacement


  • LDS Equipment Design, Production, Installation, Repair, and Maintenance Services: The services are mainly centered around various models of LDS by ATMI, covering all models of Unichem, TX4, and 3 chem. We offer refurbishment, installation, and repair services for both the whole machines and their components. Our 7×24-hour on-call service ensures prompt support whenever needed.
  • Cylinder Replacement: We provide replacement services for all types of gas and liquid cylinders. The relevant personnel have undergone comprehensive training, are certified, and possess extensive experience in relevant industry operations.
  • LDS and Gas/Liquid Testing and Verification Services: We offer on-site customer services for new suppliers of LDS, gases, and liquids.

The relevant technical staff have 10 years of on-site service experience in thin-film equipment and LDS within the semiconductor industry.


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