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Introduction
In SEMI industry, contaminants in chemicals
are killers for yield
rate in wet&Photo
process. And, in practice,
Filters are used
for removing contaminants.
However, to prevent introducing contaminants
from Filters themselves into chemicals, Filters are definitely
needed purging for ensuring “cleanliness” before using.
METAIC Filter Pre-Clean Station(自动预浸润系统) is specifically configured to meet the demands for pre-wetting & pre-cleaning Filters before installing them on production tools. In Filter Pre-Clean Station, users only need to place Filters in the manifolds. And then, just one clicking, the standalone system automatically purges Filters off-line and has no any impact on production. Not only ensuring “cleanliness” of Filters, but also decreasing down time of tools to enhance throughput.
