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Service

Design, modification and customization of gas and liquid filtration systems

Filtration System Design: Auxiliary Equipment for Secondary Purification of Pure Water in Wet and Yellow Light Machines - DIW Purification StationIn the advanced manufacturing processes of Photo/Wet e...

Design and production of ozone auxiliary equipment, and related product services.

Ozone Generator/Ozone Water System (Ozone generator/DIO3 system)We design and produce the equipment and provide installation, commissioning, and after - sales services. Our products have been ...

Technical services for LDS design and production, and cylinder replacement

LDS-related Services and Cylinder ReplacementLDS Equipment Design, Production, Installation, Repair, and Maintenance Services: The services are mainly centered around various models of LDS by ATMI, co...

IG Mini Pump Solution&Filter Pre-Clean Station

PR Reduction Solution—IntelliGen Mini（LV/MV/HV）Compact, two-stage photochemicaldispense pumpFeed StageRolling diaphragmStepper motor drivenDispense stageRolling diaphragmBrushless DC motor drivenPurge...

Design, repair and maintenance services for the water system of immersion lithography machines

IntroductionIn SEMI industry, contaminants in chemicalsare killers for yield rate in wet&Photo process. And, in practice, Filters are used for removing contaminants.However, to prevent i...

Installation, repair and maintenance services for gas purification systems

Installation, Repair and Maintenance Services for Gas Purification SystemsOur services mainly focus on various models of Entegris Aeronex, including different models of EGPS, AGPS, GPS, etc., and cove...

Haze Prevention Solution

XCDA/N2 Purge Solution For FOUP&Reticle PodLoadPort PowerdLoadPort 上进行改装,赋能Purge function (Q-time extended)Standalone N2 Purge LPIsolated Purge LoadPort Customized ProductsSmart Reticle Purge Station ...